High-Temperature Sapphire Viewports for Vacuum Chambers and Semiconductor Equipment: Thermal Shock, Sealing, Thickness and Optical Quality
Sapphire viewports are increasingly used in vacuum chambers, plasma equipment, semiconductor process tools, high-temperature furnaces and analytical systems where an ordinary glass window may not provide sufficient mechanical, thermal or chemical durability. A sapphire viewport can combine: However, designing a reliable sapphire viewport requires more than selecting a sapphire disc with the correct diameter. The








