Large Sapphire Windows for Advanced Semiconductor Equipment: Thickness Scaling, Flatness, Mounting Stress and Thermal Shock
As semiconductor equipment becomes larger, more automated and more optically sophisticated, the size of protective optical windows is also increasing. Large sapphire windows may be used in: At small dimensions, sapphire-window design can appear relatively straightforward. Specify: diameter or length × width × thickness then add the required optical polish. As the window becomes larger,








