
Sapphire Vacuum Viewport Design Guide: Flanges, Seals, Bakeout and Leak Testing
A sapphire vacuum viewport is more than an optical window mounted on a vacuum chamber. It is simultaneously an optical component, vacuum boundary, mechanical pressure barrier and thermal interface. In semiconductor process equipment, coating systems, plasma chambers, analytical instruments, research vacuum systems and laser processing equipment, an improperly designed viewport can cause slow pump-down, helium







